A MEMS Tunable Inductor
نویسندگان
چکیده
This paper reports a single-wafer micromachined radiofrequency (RF) inductor that can be integrated in a conventional RFIC device. The inductor achieved a quality factor greater than 9 at 5Ghz and a self-resonance frequency well above 15 GHz. The inductor is tunable and the inductance variation is greater than 8%.
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